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2-0923 (technical revision)
Test Medium — The test medium shall be nitrogen
The Standard is structured so that new FGs can be added to the Standard through future balloting
It expands the GEM standard requirements and capabilities in the areas of state models (TSSC
and behavior are not required to be compliant to this Specification
D05300 - SEMI D53 - Specification for Flat Panel Display (FPD) Pellicles Revision:SEMI D53-0626 - Current + Redline 2-0923 (technical revision)1 Purpose 1. 1 This Specification defines standard stand off, transmittance, and strength of pellicle films used for masks. 2 Scope 2. 1 These dimensions apply to pellicle for masks that are principally used in fabricating flat panel displays. The mask size specifies range from 330 mm 450 mm to 1620 mm 1780 mm. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility
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